last updated July 17,2000

All the news that's fit to print... MEMS Electrostatic micromechanical actuator with extended range of travel Journal of Microelectromechanical Systems 361K Effect of surface properties on the effective electrical gap of electrostatically actuated micromechanical devices operating in contact Modeling and Simulation of Microsystems, San Diego, Mar. 2000 480K Comprehensive static characterization of vertical electrostatically actuated polysilicon beams IEEE Design and Test of Computers Magazine, Special Issue on Testing for MEMS, vol 16 no 4, Oct-Dec 1999 637K Characterization of contact electromechanics through capacitance voltage measurements and simulations Journal of Microelectromechanical Systems, vol 8 no 2, Jun 1999 945K Complete characterization of electrostatically-actuated beams including the effects of multiple discontinuities and buckling Modeling and Simulation of Microsystems, Puerto Rico, Apr 1999 138K Effects of capacitors, resistors and residual charges on the static and dynamic performance of electrostatically-actuated devices SPIE Symposium on Design and Test of MEMS/MOEMS, Paris, Mar 1999 255K Characterization of electrostatically-actuated beams through capacitance-voltage measurements and simulations Modeling and Simulation of Microsystems, Santa Clara, Apr 1998 93K Nonlinear dynamic modeling of micromachined microwave switches IEEE Microwave Theory and Techniques Symposium, Denver, Jun 1997 38K 163K Electromagnetics Analysis of crosstalk between striplines using the FDTD method Stanford EE391 report 132K Ph.D. Thesis Characterization and modeling of electrostatically actuated micromechanical devices read it now! 8.7MB small JPEGs 2780K animated!