Table of Contents
PPT
Slide
Outline
Hello,
world!
How
Small is Micro?
Electromechanics
in Action
Micromachined
Microwave Switch
Physical
Models
Simulation
Models
Outline
Wheel
of Fortune
MUMPs
Process Flow
Facts
of Life
Effects
of Gold
Device
Parameters
Abaqus
2D Simulations
Outline
Characterization
of Pull-in
Buckling
Amplitude
Pull-in
Voltage
Pull-in
Behavior
Precision
and Consistency
Extrapolation
Measurements
Sub-Conclusions
Outline
Contact
Electromechanics
Rigid
Contact Surface
Contact
Surface Measurement
Compressible
Contact Surface
Dielectric
Charging
Dielectric
Charging Model
Sub-Conclusions
Outline
Actuator
with Extended Travel
Parasitic
Capacitances
Deformation
in 2D
Folded
Capacitor Concept
Folded
Capacitor Profile
Fabricated
Devices |