Nonlinear Dynamic Modeling of Micromachined Microwave Switches E. K. Chan, E. C. Kan, P. M. Pinsky, R. W. Dutton Nonlinear dynamic lumped models of micromachined microwave switches have been formulated and successfully applied to analyses of transient characteristics and geometrical scaling. Parameter extraction through electrical measurements is summarized. The results are compared to transient quasi-2D simulations.