Table of Contents
PPT Slide
Outline
Hello, world!
How Small
is Micro?
Electromechanics
in Action
Micromachined
Microwave Switch
Physical Models
Simulation Models
Outline
Wheel of Fortune
MUMPs
Process Flow
Facts of Life
Effects of Gold
Device Parameters
Abaqus 2D Simulations
Outline
Characterization
of Pull-in
Buckling Amplitude
Pull-in Voltage
Pull-in Behavior
Precision
and Consistency
Extrapolation
Measurements
Sub-Conclusions
Outline
Contact Electromechanics
Rigid
Contact Surface
Contact
Surface Measurement
Compressible
Contact Surface
Dielectric Charging
Dielectric
Charging Model
Sub-Conclusions
Outline
Actuator
with Extended Travel
Parasitic Capacitances
Deformation
in 2D
Folded
Capacitor Concept
Folded
Capacitor Profile
Fabricated Devices |