- SUPREM-IV.GS
-
Two Dimensional Process Simulation
for Silicon and Gallium Arsenide
Table of Contents
For a printable copy of this complete document, download the PDF,
PostScript or compressed PostScript.
SUPREM-IV.GS is now available here.
Edited by
S. E. Hansen and M. D. Deal
hansen@ee.Stanford.EDU, deal@ee.Stanford.EDU
Integrated Circuits Laboratory
Stanford University
Stanford, California 94305
Copyright 1993 and 1994
by The Board of Trustees of Leland Stanford Junior University.
All rights reserved.
SUPREM, SUPREM-III, SUPREM-IV, and PISCES, are registered trademarks of
Stanford University.
UNIX is a registered trademark of UNIX Systems Labs, Inc.