last updated Dec 19, 1999
These are the actual numbers from measurements and simulations of beams fabricated in MUMPs 29.
These beams are flat except for the anchor stepups. Buckling amplitude measurements are unreliable for beams less than 400um long.
|
Measured |
Simulated |
|||
|
Length |
Buckling Amplitude |
Pull-in Voltage (averaged) |
Buckling Amplitude |
Pull-in Voltage |
|
260 |
0.01 |
41.0 |
0.014 |
41.2 |
|
280 |
0.02 |
35.0 |
0.016 |
35.1 |
|
300 |
0.02 |
30.0 |
0.018 |
30.2 |
|
320 |
0.02 |
26.1 |
0.02 |
26.2 |
|
340 |
0.01 |
22.7 |
0.022 |
22.8 |
|
360 |
0.01 |
19.9 |
0.025 |
20.0 |
|
380 |
0.02 |
17.4 |
0.028 |
17.5 |
|
400 |
0.01 |
15.4 |
0.031 |
15.4 |
|
420 |
0.02 |
13.5 |
0.035 |
13.6 |
|
440 |
0.02 |
11.9 |
0.04 |
12.0 |
|
460 |
0.03 |
10.5 |
0.046 |
10.6 |
|
480 |
0.04 |
9.2 |
0.054 |
9.4 |
|
500 |
0.06 |
8.2 |
0.064 |
8.3 |
|
520 |
0.06 |
7.1 |
0.078 |
7.3 |
|
540 |
0.09 |
6.2 |
0.1007 |
6.3 |
|
560 |
0.11 |
5.2 |
0.1372 |
5.5 |
|
580 |
0.16 |
4.4 |
0.207 |
4.8 |
|
600 |
0.28 |
3.7 |
0.3508 |
4.1 |
|
610 |
0.4548 |
3.7 |
||
|
620 |
0.51 |
3.1 |
0.5663 |
2.4 |
|
630 |
0.6758 |
2.9 |
||
|
640 |
0.72 |
3.4 |
0.7793 |
3.2 |
|
660 |
0.91 |
4.2 |
0.9683 |
4.0 |
|
680 |
1.09 |
5.1 |
1.137 |
4.8 |
|
700 |
1.25 |
6.0 |
1.291 |
5.5 |
|
720 |
1.40 |
6.6 |
1.434 |
6.2 |
|
740 |
1.52 |
7.2 |
1.568 |
6.8 |
|
760 |
1.66 |
7.7 |
1.696 |
7.3 |
|
780 |
1.78 |
8.3 |
1.818 |
7.8 |
|
800 |
1.89 |
8.8 |
1.935 |
8.3 |
|
820 |
2.01 |
9.2 |
2.049 |
8.7 |
|
840 |
2.13 |
2.16 |
9.0 |
|
These beams have additional discontinuities besides the anchor stepups. Buckling amplitude measurements are unreliable for beams less than 400um long.
Beams over POLY0 pads
|
Measured |
Simulated |
|||
|
Length |
Buckling Amplitude |
Pull-in Voltage |
Buckling Amplitude |
Pull-in Voltage |
|
260 |
0.06 |
41.1 |
0.074 |
39.0 |
|
280 |
0.083 |
33.5 |
||
|
300 |
0.08 |
29.5 |
0.094 |
28.9 |
|
320 |
0.1055 |
25.3 |
||
|
340 |
0.10 |
22.5 |
0.1179 |
22.1 |
|
360 |
0.1317 |
19.5 |
||
|
380 |
0.12 |
17.6 |
0.1471 |
17.3 |
|
400 |
0.1645 |
15.3 |
||
|
420 |
0.16 |
13.9 |
0.1843 |
13.7 |
|
460 |
0.19 |
11.1 |
0.2338 |
10.9 |
|
500 |
0.26 |
8.9 |
0.3032 |
8.7 |
|
540 |
0.34 |
7.1 |
0.4069 |
7.0 |
|
580 |
0.46 |
5.9 |
0.559 |
5.8 |
|
600 |
0.6565 |
5.4 |
||
|
620 |
0.64 |
5.4 |
0.7666 |
5.3 |
|
640 |
0.8857 |
5.4 |
||
|
660 |
0.88 |
5.9 |
1.01 |
5.6 |
|
700 |
1.13 |
6.4 |
1.262 |
6.3 |
|
740 |
1.35 |
7.1 |
1.506 |
7.2 |
|
780 |
1.58 |
8.1 |
1.741 |
8.0 |
|
820 |
1.83 |
8.9 |
1.966 |
8.7 |
|
840 |
2.075 |
9.0 |
||
Beams with Dimples
|
Measured |
Simulated |
|||
|
Length |
Buckling Amplitude |
Pull-in Voltage (average) |
Buckling Amplitude |
Pull-in Voltage |
|
220 |
-0.07 |
30.4 |
-0.054 |
31.1 |
|
240 |
-0.062 |
25.6 |
||
|
260 |
-0.09 |
20.7 |
-0.071 |
21.3 |
|
280 |
-0.081 |
17.9 |
||
|
300 |
-0.11 |
14.8 |
-0.091 |
15.2 |
|
320 |
-0.1028 |
13.0 |
||
|
340 |
-0.13 |
10.8 |
-0.1154 |
11.2 |
|
360 |
-0.1294 |
9.6 |
||
|
380 |
-0.16 |
8.0 |
-0.145 |
8.3 |
|
400 |
-0.1627 |
7.2 |
||
|
420 |
-0.19 |
5.8 |
-0.183 |
6.2 |
|
440 |
-0.2064 |
5.4 |
||
|
460 |
-0.24 |
4.3 |
-0.2338 |
4.6 |
|
500 |
-0.31 |
3.1 |
-0.3053 |
3.4 |
|
540 |
-0.43 |
2.1 |
-0.4128 |
2.4 |
|
580 |
-0.60 |
1.3 |
-0.5702 |
1.6 |
|
620 |
-0.84 |
0 |
-0.7826 |
0.9 |
|
640 |
-0.903 |
0.6 |
||
|
660 |
-1.09 |
0 |
-1.028 |
0.3 |
|
700 |
-1.09 |
0 |
-1.12 |
0 |
|
740 |
-1.09 |
0 |
-1.12 |
0 |
|
300um long, 50um center, symmetric |
||
|
Bias |
Pull-in (measured) |
Pull-in (simulated) |
|
0 |
49.4 |
48.8 |
|
10 |
49.0 |
48.2 |
|
20 |
47.3 |
46.6 |
|
25 |
45.8 |
45.1 |
|
30 |
43.7 |
43.1 |
|
35 |
40.6 |
40.1 |
|
40 |
35.7 |
35.0 |
|
45 |
26.0 |
25.5 |
|
47 |
19.0 |
18.0 |
|
48 |
13.2 |
3 |
|
49 |
5.3 |
|
|
50 |
0 |
|
|
350um long, 50um center, symmetric |
||
|
Bias |
Pull-in (measured) |
Pull-in (simulated) |
|
0 |
33.2 |
33.5 |
|
10 |
32.4 |
32.7 |
|
15 |
31.3 |
31.6 |
|
20 |
29.4 |
29.7 |
|
25 |
26.0 |
26.4 |
|
28 |
22.6 |
22.9 |
|
30 |
18.9 |
19.2 |
|
32 |
12.9 |
13.5 |
|
33 |
7.0 |
2.5 |
|
350um long, 50um center, 15um shift, asymmetric |
||
|
Bias |
Pull-in (measured) |
Pull-in (simulated) |
|
0 |
29.7 |
29.8 |
|
10 |
29.0 |
29.3 |
|
20 |
27.1 |
27.3 |
|
25 |
25.2 |
25.5 |
|
30 |
22.2 |
22.6 |
|
33 |
19.2 |
19.6 |
|
35 |
16.0 |
16.5 |
|
37 |
10.9 |
11.5 |
|
38 |
6.2 |
2.5 |
|
39 |
0 |
0 |