Papers Published
Z. K. Hsiau, E. C. Kan, J. P. McVittie, and R. W. Dutton "Robust, Stable, and Accurate Boundary Movement for Physical Etching and Deposition Simulation," IEEE Trans. Electron Devices, vol. 44, p. 1375, 1997
G. Cornella, S-H Lee, W.D. Nix, and J.C. Bravman, "An analysis technique for extraction of thin film stresses from x-ray data", Appl. Phys. Lett., 71 (20), 1997.
E. K. Chan, E. C. Kan, P. M. Pinsky and R. W. Dutton, "Nonlinear Dynamic Modeling of Micromachined Microwave Switches," MTT Conference, June 1997.
E. C. Kan, Z. K. Hsiau, V. Rao, and R. W. Dutton "Gridding Techniques for the Level Set Method in Semiconductor Process and Device Simulation," 1997 Int'l Conf. on Simulation of Semiconductor Processes and Devices (SISPAD'97) Tech. Dig., p. 327, Sept. 1997.
R.W. Dutton, E. Chan, Z-K. Hsiau, S. Shen, “Challenges in Process Modeling for MEMS,” International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM 98), Santa Clara, CA., April 6-8, 1998.