Tasks & Objectives
Task 1. Software Development (Dutton)
Demo of fully-integrated, FEM-based solver capabilities for modeling structural/process-dependent behavior of MEMS.
Develop hierarchical extraction methodology (and lumped models) in support of physical modeling, design optimization and test of CAD
Task 2. Materials Characterization (Bravman)
Define materials issues for reliability in MEMS devices.
Develop extraction schemes of materials properties including in-situ test MEMS structures
Task 3. MEMS Device Design & Testing (Kovacs)
Design and implementation of MEMS structures for parameter extraction that facilitate critical evaluation of models & CAD.
Support for both application-pull and parametric (CAD) design, based on limits due to (new) materials and processing.