?????????--Advanced CAD for MEMS

Hierarchical extraction of

essential behavior from

detailed FEM models

Goals:

Approach:

Status:

Ability to prototype MEMS

devices with advanced

CAD that exploits progress

in VLSI TCAD

1D Compact

Model

Schedule:

Year 2 | Q2 3|

• 3D Geo Proto. based on (Adv. Geo & Grid)

TTX+CIF(in) -> VRML(out) (Integration & GUI)

• Integrated CAD Demo (FEM Solvers)

• Test Chips -- Materials (Test Structures)

Char. & Fatigue Struct. (Materials Eval.)

• RF Switch Demo (new (Demonstrations)

materials)

? NOW

RF Switch as Demo (i.e.. MAFET Pgm.)

Level-set geometry

creation (simulation-based)

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