Initialization, Grid Setup, and Pre-Field Oxidation
SUPREM-IV.GS B.9305
(c) 1991-1993 Stanford University
(c) 1991 University of Florida
Reading Models...
option quiet
#x dimension
line x loc=0.0 spacing=0.2 tag=left
line x loc=1.0 spacing=0.05
line x loc=2.0 spacing=0.2 tag=right
#y dimension
line y loc=0.0 tag=top
line y loc=1.0 tag=bottom
#silicon
region silicon xlo=left xhi=right ylo=top yhi=bottom
#exposed surface
bound exposed xlo=left xhi=right ylo=top yhi=top
#Comment Start with <100> Silicon, p doped to 20 ohm resistivity.
initialize boron conc=9.0e14 ori=100
oxide orient=100 wet lin.h.0=2.428e6 lin.l.0=2.793e4
#suprem iv default coefficients
boron silicon Dix.0=0.37 Dip.0=0.72 Dix.E=3.46 Dip.E=3.46
arsenic silicon Dix.0=8.0 Dim.0=12.8 Dix.E=4.05 Dim.E=4.05
#Comment Pad Oxidation.
method compress init=1.0e-3
diffuse time=42 temp=950 dryo2
estimated first time step -0.000000e+00
Solving 0 + 0.001 = 0.001, 100%, np 57
Solving 0.001 + 0.0488213 = 0.0498213, 4882.13%, np 57
Solving 0.0498213 + 0.432581 = 0.482402, 886.05%, np 57
Solving 0.482402 + 1.03409 = 1.51649, 239.051%, np 57
Solving 1.51649 + 2.2695 = 3.786, 219.469%, np 57
Solving 3.786 + 6.36449 = 10.1505, 280.435%, np 57
Solving 10.1505 + 21.3576 = 31.5081, 335.575%, np 57
Solving 31.5081 + 53.6017 = 85.1098, 250.972%, np 57
Solving 85.1098 + 121.424 = 206.534, 226.53%, np 57
Solving 206.534 + 327.976 = 534.51, 270.108%, np 57
Solving 534.51 + 1118.94 = 1653.45, 341.165%, np 57
Solving 1653.45 + 866.551 = 2520, 77.444%, np 57
deposit nitride thick=0.08 div=1
deposit photoresist thick=1
#Field implant mask at edge of collector
etch photoresist left p1.x=1.0
etch nitride left p1.x=1.0
implant boron energy=100 dose=1e13
etch photoresist all
struct out=prefieldox.s
#Comment Field Ox
#Use viscous model
# oxide and nitride parameters from Griffin
oxide Vc=425 Vr=12.5 Vd=65 stress.dep=t
material oxide visc.0 = 2.25e14 visc.E = 0.000 visc.x = 0.499 wet
mater nitride visc.0=4.3e14 visc.E=0.0
meth viscous oxide.rel=1e-2
diffuse time=18 temp=1000 argon
estimated first time step -0.000000e+00
Solving 0 + 0.001 = 0.001, 100%, np 67
Solving 0.001 + 10.0627 = 10.0637, 1.00627e+06%, np 67
Solving 10.0637 + 18.5276 = 28.5913, 184.122%, np 67
Solving 28.5913 + 41.4073 = 69.9986, 223.49%, np 67
Solving 69.9986 + 65.8414 = 135.84, 159.009%, np 67
Solving 135.84 + 104.257 = 240.097, 158.345%, np 67
Solving 240.097 + 382.254 = 622.351, 366.647%, np 67
Solving 622.351 + 457.649 = 1080, 119.724%, np 67
diffuse time=10 temp=1000 dryo2
estimated first time step -0.000000e+00
Solving 0 + 0.001 = 0.001, 100%, np 67
Continued too far, backing off.
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Newton convergence failed. Giving up...
Solving 0.001 + 0.344928 = 0.345928, 34492.8%, np 67
Solving 0.345928 + 10.7312 = 11.0771, 3111.15%, np 67
Solving 11.0771 + 112.018 = 123.095, 1043.85%, np 67
Solving 123.095 + 476.905 = 600, 425.739%, np 67
struct out=init.str
