Task 3. Accomplishments & Plans
Test Array Actuated Structures (TestAroSA ) results show: 1) viability for new materials characterization, 2) sensitivity to overall thermal cycling (+/-)
Interferometer (Zygo) installed results demonstrate sub-nm (z-) resolution as well as lateral “stitching” across mm’s
Zygo measurements on C-V structures used to determine critical dimensions, supporting improved accuracy of materials extraction
Improve process flow and thermal cycles to optimize fabrication, including the use of new metal layers (c2)->link to Task #1
Complete diagnosis on Test Array to quantify accuracy limits and to formalize testing procedures
Identify application(s) that leverages Test Array for specific (RF) end-user target performance requirements (a1)