Task 1. Accomplishments & Plans
Developed geometry server (3D and quasi-3D) based on level set
Portable geometry representation define and demonstrated--- VRML-based in support of prototyping across the internet
Parameter (C-V) extraction for doubly-clamped beams (MUMPs process) that quantifies accuracy of method and parameters based on measurements and simulation
Integrated Demo (d1) that uses: quasi-3D geometry(g1), meshing (m1) and FEM-based multi-physics simulations
Canonical (RF) test structure characterization --simulation and experimentation (MUMPs) and moving towards other metals (t1)
Feasibility for FEM modeling of: 1) fatigue (f1) and 2) alternate materials--metals (c2)
Interferometric measurements integrated into data flow for: a) extraction from C-V, b) parameterized geometry/stress