Advanced CAD for iMEMS (ACADEMIA) Robert W. Dutton, Stanford University
ACADEMIA--Advanced CAD for MEMS
Tasks & Objectives
Major Accomplishments
Milestones and Schedule
Overview of Tasks & Deliverables
Task 1. Accomplishments & Plans
Pseudo 3D Process Simulation
Simulation Results
Task 2. Accomplishments & Plans
Load Drop observed in Microtensile sample
SEM Image Comparison
Task 3. Accomplishments & Plans
Fabrication and Measurement (Testarosa)
Design PROBLEM...
Progress towards Inter-Operability
Research Issues/Challenges
Papers Published
Papers Published (cont'd)
Email: perea@gloworm.stanford.edu
Home Page: http://www-tcad.stanford.edu/
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