Object-Oriented Information Models for Next-Generation TCAD Simulators

Currently under development are object-oriented information models for next-generation TCAD simulators. These models allow representation and manipulation of three-dimensional data, and are applying these capabilities primarily to 3D semiconductor wafer information. Through the use of these modeling techniques, construction of 3D geometrical representations of wafers and associated structures such as interconnects and oxide layers are possible. Also these geometries are used as the basis for device and circuit simulation through the use of two and three dimensional meshing tools.

Ken Wang is working on the development of an application which is based on the 3D graphical tools we have built. This application demonstrates the ability to generate highly realistic 3D structures in an integrated, intuitive fashion. Current work involves the expansion of geometrical operations which are available to the user. These will further improve the realism of the resulting structures and the ease with which they are created.

Ken Wang(wang@gloworm.Stanford.EDU)
AEL 229
Integrated Circuits Laboratory
Stanford University
Stanford, CA 94305-4055