SUPREM IV
VERSION: 9130
VERSION DATE: 01-AUG-91
FUNCTION: two-dimensional process simulation
AUTHORS: Law,Rafferty,Dutton
DESCRIPTION: Performs two-dimensional silicon process simulation using 
advanced physically based diffusion models to calculate 2D profiles.  
Advanced oxidation models provide accurate modeling of isolation structures.
OTHER SUPPORT: email,suprem4-bugs@gloworm.stanford.edu
PRINCIPAL INVESTIGATOR: Robert Dutton
hyper link: Rules and Sources
SOFTWARE CONTACT:
  EECF
  AEL 113, Stanford University, Stanford, CA 94306-4055
  phone: 415-7231004
  action@eecf.Stanford.EDU
  fax: 415-7231294
TECHNICAL CONTACT:
  suprem4@gloworm.stanford.edu