TCAD Tools at Stanford University - SUPREM III

VERSION: 8628
FUNCTION: one-dimensional process simulation
RELEASE LEVEL: 2
AUTHORS: Stephen Hansen, Robert Dutton
DESCRIPTION: one-dimensional silicon process simulation
TECHNICAL RESTRICTIONS: unrestricted, now available here: Rules and Sources
OTHER SUPPORT: no support provided.
PRINCIPAL INVESTIGATOR: Robert Dutton
SOFTWARE CONTACT:hyper link support only.
TECHNICAL CONTACT:no longer supported.
TECHNICAL MANUAL: Postscript, PDF