The SUPREM-IV.GS Models Commands

DESCRIPTION

This section contains the commands used to change model parameters and coefficients. The parameters and equations they belong to are described briefly on the statement descriptions. References are provided, where necessary, to help clarify the physics involved in the simulator.

The file for the initialization of all the constants is human readable (usually called modelrc). Unfortunately, this means that SUPREM-IV.GS can be slow in starting up because it has to parse the file. Local modification of the file is encouraged, because many of the parameters are areas of active research and can not be guaranteed, other parameters may be dependent upon the equipment used locally.

The model statements can be broken up by diffusion impurity. All the parameters concerning arsenic diffusion, segregation, and clustering are on the same statement. The oxide statement contains some material information as well as parameters for oxidant diffusion.

BUGS

These commands implement the best physics we have worked out to date. However, that is a day to day proposition.

SEE ALSO

See the other model statement descriptions for more detail. Most of the model statements will include references to the relevant published papers. Please see these Stanford University Ph.D. theses for more information.