Alamode assumes that coordinates in the file are in microns and scales them internally to be in centimeters. This allows the same units for diffusivities to as for SUPREM.
############################################################################# # # Proposal for a simple 1D file format for use with Alamode # # Martin Giles Intel Corporation June 1996 # Revision 0.1 # # # All lines beginning with a "#" character are comments and will be ignored. # # Comment lines and empty lines (spaces and tabs only) can appear anywhere # in the file. # # The maximum allowable line length is 511 characters. # # Each line in the file consists of a key character followed by arguments. # Entries must appear in the order shown in this example file. # Whitespace can be any combination of spaces and tabs. String-like arguments # are always enclosed in double quotes and may contain whitespace. # ############################################################################# # # The first entry in the file describes the file format version. This will # allow us to recognize old files after the format changes. # # v versionnumber # v 1 # ############################################################################# # # The next entry allows us to store descriptive strings for this file. These # may be ignored or, hopefully, used in output logs and the results files. # # s argstring # s "Example 1D input file format" s "Martin Giles 6/27/96" s "There is no limit to how many of these there can be, but I expect that" s "most programs will ignore all but the first one or two" # ############################################################################# # # The next entries in the file list the field names. Names must eventually # match names used in the Alamode equation script. It would be best to use # standard names for the variables but it is not mandatory. Standard names do # not contain any whitespace. We will add to the standard list as necessary. # Capitalization in the names is significant. # # Initial standard field name list for diffusion problems: # # Antimony ActiveAntimony SBIClusters # Arsenic ActiveArsenic ASIClusters # Boron ActiveBoron BIClusters # Indium ActiveIndium INIClusters # Phosphorus ActivePhosphorus PIClusters # Interstitials 311Defects # Vacancies # Defect # Traps # NetDoping # Potential # # f fieldname # f "Boron" f "ActiveBoron" f "Arsenic" f "ActiveArsenic" # ############################################################################# # # The input is divided into regions of a single material. As with fields, # some conventional material names are defined to help keep scripts # consistent. Regions must be listed in order of increasing x, with # the lowest x value assumed to be the exposed wafer surface. # # Initial standard material name list for diffusion problems: # # Silicon # SiliconDioxide # SiliconNitride # SiliconOxyNitride # PolySilicon # Aluminum # Titanium # TitaniumSilicide # TitaniumNitride # # r regionname # r "PolySilicon" # ############################################################################# # # For each region the x locations of the nodes in that region must be listed # in depth order. For each node, solution values for all fields must be # provided. # # x xlocation field0val field1val field2val ... # x 0.0 1.0e18 1.0e18 1.0e21 2.0e20 x 0.1 1.0e18 1.0e18 9.0e20 1.8e20 x 0.2 1.0e18 1.0e18 6.0e20 1.2e20 x 0.3 1.0e18 1.0e18 3.0e20 8.0e19 # ############################################################################# # # Regions are listed in sequence, and must start at the same x location # that the previous region ended at. Touching regions will usually # be of different materials, but this is not required. # r "Silicon" x 0.3 7.0e17 7.0e17 2.0e20 7.0e19 x 0.5 7.0e17 7.0e17 1.0e20 6.0e19 x 1.0 7.0e17 7.0e17 5.0e19 5.0e19 r "SiliconDioxide" x 1.0 0.0 0.0 0.0 0.0 x 1.5 0.0 0.0 0.0 0.0 x 2.0 0.0 0.0 0.0 0.0 # ############################################################################# # # If there is other simulator-specific information that needs to be stored, # then private data commands can be used. These are ignored by any # simulator that does not recognize the source. Private commands # can appear anywhere in the input file. # # p simulatoridstring private information ...... # p "Intel Suprem4 2.11" a 2 37.7 p "Intel Suprem4 2.11" a 3 1035 111 p "Intel Suprem4 2.11" other junk here # ############################################################################# # # There is no special end-of-file marker. # #############################################################################