VRML figures from the Stanford MEMS Project

The following figure can be viewed by a VRML browser that is VRML 2.0 compliant. Browser and plug-ins information (source code, etc.) can be downloaded from the following site: The VRML Repository/

We have had much success with the browsers VRWave and CosmoPlayer from SGI which has allowed us to view the layers of an SRAM cell while providing information on what materials compose each layer as well.

The results of fatigue and tensile tests for MEMS structures (by Prof. Bravman's group) is password-protected and will only be made available to contract monitors (to protect unpublished data). Please send a note to dutton@gloworm.stanford.edu or perea@gloworm.stanford.edu to obtain the password.

Please click on the figure to view VRML file.

Below is a figure referenced in the SISPAD '98 paper on "Layout-based 3D Solid Modeler of IC Structures and Interconnects including Electrical Parameter Extraction" by X. Qi, S. Shen, Z-K Hsiau, Z. Yu and R.W. Dutton.


perea@gloworm.stanford.edu
May 27, 1998